Cleaning and reinspection

Residue left after cleaning affects the cost of a probe card, as assembly consistency, storage environment and test criteria do. Without equipment for this stage, problems surface late, in volume production.

The equipment runs atomized IPA, controlled soft brushing and clean-gas blow-off by recipe. Three-direction images then judge residue, particles, bent probes and abnormal morphology. Judgement thresholds are defined by the customer's acceptance method.