01 · APM90A (TSK, 200 mm)
A machine that still does the job should not have to be replaced whole
The Tokyo Seimitsu APM90A is the generation before the UF200: a 200 mm fully automatic prober installed across Korea, Japan and Taiwan between 1994 and 1997.
How it works
- load
- align
- touch down
- results
What we take on
- SourcingOn this generation the hot chuck, porous chuck, cold chuck, automatic card change and GP-IB are all options - two machines of the same model can differ completely. We check the option list unit by unit rather than inferring it from the model.
- ShippingAbout 750 kg and roughly 1.1 m square, so it lifts as a whole. Inventory and condition are recorded before teardown, optics and chuck are packed separately, and transport and customs are arranged to destination.
- RefurbishmentFull clean, air and vacuum lines re-checked, wear parts replaced, chuck flatness and hold uniformity re-measured. The storage media of this generation went out of production long ago, and replacing it usually drags in companion parts and a software reinstall - that work is priced in up front.
- InstallationInstallation needs compressed air and vacuum both present - site conditions are confirmed before the machine arrives, then it is placed, levelled, powered, linked and signed off item by item.




