Atomized IPA, controlled brushing, clean gas and closed-loop review
Probe Card Cleaning and Three-Direction Reinspection
The equipment runs atomized IPA, controlled soft brushing and clean-gas blowoff by recipe, then checks probe-tip particles and residue with three-direction images. Card ID/RFID, cycle count, images, judgement and rework history can be stored per card.
Probe card cleaning and reinspection process. Mechanism, handling and process settings are designed for the card and site conditions.
The same points in words
- Delivery
- Reduces unnecessary wetting and supports recipe control
- Cleaning
- Motion, contact and cycles are probe-defined
- Drying
- Creates a stable entry state for reinspection
- Review
- Records particles and residue
Equipment and engineering solution
Applications
Designed for the following probe card manufacturing, test and maintenance tasks.
In-line maintenance
Repeated contamination
Standalone cleaning cell
The same points in words
- In-line maintenance
- Run traceable cleaning, reinspection and release between test and storage.
- Repeated contamination
- Use review images to separate clean, rework and isolation states.
- Standalone cleaning cell
- Manage cleaning for different card types through Card ID/RFID, recipes and reports.
SPECIFICATIONS
Specifications
The final configuration follows the card, interfaces, site conditions and acceptance items.
See the full specification table
| Item | Specification / configuration | Notes |
|---|---|---|
| Card compatibility | Cantilever and vertical probe cards | Holding, attitude and keep-out zones designed per card type |
| Changeover and service | Fast changeover, brush replacement, fixture service and poka-yoke | Consumable life and service interval set from measured data |
| Cleanliness and ESD | Local cleanliness, splash and cross-contamination control; ESD-controlled contact parts | Targets set to the customer cleanroom specification |
| Traceability | Card ID / RFID | Records card number, recipe, clean count, images, verdict and operator |
| Deployment | Standalone station or inline; can serve as a clean-and-inspect submodule inside a larger tool | Mechanical, electrical, communication and safety interlock boundaries defined per project |
| Result state | Release / rework / reinspect / quarantine | Judgement rules defined by the customer acceptance method |
WORKFLOW
Workflow
01 Identify and pre-inspect
02 Recipe-controlled clean
03 Three-direction reinspection
04 Release or close the loop
The same points in words
- Identify and pre-inspect
- Read Card ID/RFID and confirm card type, contamination area and permitted cleaning method.
- Recipe-controlled clean
- Execute atomized IPA, controlled brushing and clean-gas blowoff by recipe.
- Three-direction reinspection
- Capture images and judge residue, particles and anomalies against project limits.
- Release or close the loop
- Release to test/storage or route to rework, repeat inspection and isolation.
FAT / SAT
Project delivery
Sample evaluation
Technical agreement
FAT
SAT
The same points in words
- Sample evaluation
- Confirm the object, interfaces, current state, failure modes and available validation samples.
- Technical agreement
- Define configuration, measurement method, limits, takt, data interfaces and responsibilities.
- FAT
- Verify functions, repeatability, reporting and exception handling with agreed samples.
- SAT
- Complete site integration, training, upstream/downstream interfaces and issue closure.
CONFIGURATION
Configuration and acceptance
System configuration, optional items and acceptance conditions are summarized below.
Process parameters
Cleaning settings, particle detection, task time and review limits are established with the target probe and contamination samples.
Standard process
Atomized IPA, controlled brushing, clean gas and three-direction reinspection are managed in one recipe.
Delivery scope
Material compatibility, recipes, judgement, task time and interfaces are defined in project documents and accepted in FAT/SAT.
Share the card, interfaces and target
Send the sample, installed equipment, current issue and target takt. We will acknowledge receipt within one business day.