Atomized IPA, controlled brushing, clean gas and closed-loop review
Probe Card Cleaning and Three-Direction Reinspection
The equipment runs atomized IPA, controlled soft brushing and clean-gas blowoff by recipe, then checks probe-tip particles and residue with three-direction images. Card ID/RFID, cycle count, images, judgement and rework history can be stored per card.
Probe card cleaning and reinspection process. Mechanism, handling and process settings are designed for the card and site conditions.
Equipment and engineering solution
Applications
Designed for the following probe card manufacturing, test and maintenance tasks.
In-line maintenance
Run traceable cleaning, reinspection and release between test and storage.
Repeated contamination
Use review images to separate clean, rework and isolation states.
Standalone cleaning cell
Manage cleaning for different card types through Card ID/RFID, recipes and reports.
SPECIFICATIONS
Specifications
The final configuration follows the card, interfaces, site conditions and acceptance items.
| Item | Specification / configuration | Notes |
|---|---|---|
| Liquid delivery | Atomized IPA | Flow, spray area and material compatibility follow sample confirmation |
| Brushing | Controlled soft-brush motion and contact | Brush type, contact mode, cycles and count are recipe-controlled |
| Blowoff | Clean gas | Gas conditions and end criteria follow facility and sample needs |
| Visual reinspection | Three-direction images and judgement | Particle size, detection limit and inspection area are frozen through sample experiments |
| Identity | Card ID / RFID | Records card, recipe, cleaning count, images, judgement and operator |
| Deployment | Standalone or in-line | Integrates with test, storage and factory interfaces by project |
| Result states | Release / rework / reinspect / isolate | Judgement rules follow the customer acceptance method |
WORKFLOW
Workflow
Identify and pre-inspect
Read Card ID/RFID and confirm card type, contamination area and permitted cleaning method.
Recipe-controlled clean
Execute atomized IPA, controlled brushing and clean-gas blowoff by recipe.
Three-direction reinspection
Capture images and judge residue, particles and anomalies against project limits.
Release or close the loop
Release to test/storage or route to rework, repeat inspection and isolation.
FAT / SAT
Project delivery
Sample evaluation
Confirm the object, interfaces, current state, failure modes and available validation samples.
Technical agreement
Define configuration, measurement method, limits, takt, data interfaces and responsibilities.
FAT
Verify functions, repeatability, reporting and exception handling with agreed samples.
SAT
Complete site integration, training, upstream/downstream interfaces and issue closure.
CONFIGURATION
Configuration and acceptance
System configuration, optional items and acceptance conditions are summarized below.
Process parameters
Cleaning settings, particle detection, task time and review limits are established with the target probe and contamination samples.
Standard process
Atomized IPA, controlled brushing, clean gas and three-direction reinspection are managed in one recipe.
Delivery scope
Material compatibility, recipes, judgement, task time and interfaces are defined in project documents and accepted in FAT/SAT.
Share the card, interfaces and target
Send the sample, installed equipment, current issue and target takt. We will acknowledge receipt within one business day.