Probe card assembly equipment category visual

Pick · align · weld · closed-loop verification

MEMS Probe Card Pin Assembly and Laser Micro-Welding

The station is configured around the probe, substrate, fixture and datum. Each probe passes three gripper handovers - pick, alignment and weld - before laser micro-welding, and an autofocus check confirms position afterwards. What actually decides yield is not the weld itself but whether a defect can be caught immediately after: that step is handled by PCT5801 electrical test and DeepTouch1000 whole-card touchdown validation.

Category visual for probe card assembly equipment. The actual pick, alignment and laser micro-welding stations are designed per probe type, card type and sample.
Process chainPick → align → weld
JoiningLaser micro-welding
Post-weld checkAutofocus inspection
Closed loopPCT5801 + DeepTouch1000
The same points in words
Process chain
Three gripper handovers
Joining
Joint condition confirmed by vision
Post-weld check
Confirms weld position and contact face
Closed loop
Electrical and whole-card mechanical re-verification
Equipment and engineering solution

Applications

Designed for the following probe card manufacturing, test and maintenance tasks.

New card introduction

Manual-process standardization

Post-assembly quality loop

The same points in words
New card introduction
Establish process windows and fixture design from probe type, substrate and datum.
Manual-process standardization
Turn operator-dependent steps into recipes, images, judgements and exception records.
Post-assembly quality loop
Relate AOI, XYZ, probe height/force and electrical results to the assembly lot.
SPECIFICATIONS

Specifications

The final configuration follows the card, interfaces, site conditions and acceptance items.

ScopeMEMS and project-defined probe / substrate combinationsProbe type, material and datum confirmed on samples
Pick stationProbe taken from the tray and presented to the alignment stageSlot-to-probe clearance designed per probe type
Alignment stationAlignment stage corrects attitude and positionCoplanarity of fixed and moving jaws drives handover distortion
Weld stationWeld gripper transfers the probe for laser micro-weldingEnergy and dwell time held in the recipe
Gripper requirementFixed and moving jaw, pneumatic actuationClearance matched to probe thickness: too wide loses grip, too tight deforms the probe
Post-weld inspectionAutofocus check of weld positionAlso the reference contact point for wafer electrical test
See the full specification table
ItemSpecification / configurationNotes
Recipe and traceabilityWork order, material, operator, recipe version and resultSupports version traceability and review
Post-assembly validationAOI, probe-tip XYZ, Pin Force and electrical checksCombination selected by acceptance method
SafetyMotion limits, fixture interlock and fault stopConfirmed by equipment risk assessment
WORKFLOW

Workflow

  1. 01

    Pick

  2. 02

    Align

  3. 03

    Weld

  4. 04

    Verify

The same points in words
Pick
The pick gripper takes the probe from the tray and seats it against the alignment datum Avoiding added distortion during handover is the precondition for accuracy
Align
The alignment stage clamps and corrects probe attitude Gripper coplanarity and perpendicularity are the critical assembly metrics
Weld
The weld gripper transfers the probe and laser micro-welding runs Joint consistency controlled by vision and recipe
Verify
Autofocus position check, then PCT5801 and DeepTouch1000 Locates weld problems while still at the assembly stage
FAT / SAT

Project delivery

01

Sample evaluation

02

Technical agreement

03

FAT

04

SAT

The same points in words
Sample evaluation
Confirm the object, interfaces, current state, failure modes and available validation samples.
Technical agreement
Define configuration, measurement method, limits, takt, data interfaces and responsibilities.
FAT
Verify functions, repeatability, reporting and exception handling with agreed samples.
SAT
Complete site integration, training, upstream/downstream interfaces and issue closure.
CONFIGURATION

Configuration and acceptance

System configuration, optional items and acceptance conditions are summarized below.

Process parameters

Placement accuracy and UPH are determined by sample trials on the target probe, substrate and fixture; no universal cross-customer figure is published.

Closed-loop capability

PCT5801 covers post-weld electrical verification and DeepTouch1000 covers whole-card touchdown and 3D tip inspection, so anomalies trace back to a specific probe position.

Deliverables

Fixtures, algorithms, takt and the post-inspection combination are written into the technical agreement and verified at FAT/SAT.

Share the card, interfaces and target

Send the sample, installed equipment, current issue and target takt. We will acknowledge receipt within one business day.