Fixture, vision alignment, recipe and post-assembly validation
MEMS Probe Card Pin-Assembly Equipment
The assembly station is built around the probe, substrate, fixture and datum. Vision-assisted alignment, recipe control and exception records manage the process, while AOI, XYZ, Pin Force and electrical checks close the post-assembly loop.
Category visual for assembly fixture and substrate. Actual station, holding and datum are sample-designed.
Equipment and engineering solution
Applications
Designed for the following probe card manufacturing, test and maintenance tasks.
New card introduction
Establish process windows and fixture design from probe type, substrate and datum.
Manual-process standardization
Turn operator-dependent steps into recipes, images, judgements and exception records.
Post-assembly quality loop
Relate AOI, XYZ, probe height/force and electrical results to the assembly lot.
SPECIFICATIONS
Specifications
The final configuration follows the card, interfaces, site conditions and acceptance items.
| Item | Specification / configuration | Notes |
|---|---|---|
| Objects | MEMS and project-defined probe/substrate combinations | Probe type, material and datum are confirmed with samples |
| Holding and positioning | Dedicated fixture, substrate datum and changeover design | Holding stability and accessibility are verified first |
| Vision capability | Assisted alignment, position confirmation and exception image records | Accuracy and field of view are established with sample trials |
| Recipe | Work order, material, operator, recipe version and process result | Supports version traceability and review |
| Post-assembly checks | AOI, XY, Z, Pin Force and electrical checks | Selected items and limits follow the acceptance method |
| Automation interface | Loading, unloading, status and factory interface | Designed for target takt and capacity |
| Safety | Motion boundary, fixture interlock and exception stop | Confirmed through equipment risk assessment |
WORKFLOW
Workflow
Decompose sample and process
Confirm probe type, substrate, holding, datum, sequence and failure modes.
Run fixture and vision experiments
Verify accessibility, alignment method, field of view, image quality and exception handling.
Recipe-controlled assembly
Place actions, parameters, operator and materials under controlled recipes.
Validate after assembly
Run project-selected AOI, XYZ, Pin Force or electrical checks and write results back to the lot.
FAT / SAT
Project delivery
Sample evaluation
Confirm the object, interfaces, current state, failure modes and available validation samples.
Technical agreement
Define configuration, measurement method, limits, takt, data interfaces and responsibilities.
FAT
Verify functions, repeatability, reporting and exception handling with agreed samples.
SAT
Complete site integration, training, upstream/downstream interfaces and issue closure.
CONFIGURATION
Configuration and acceptance
System configuration, optional items and acceptance conditions are summarized below.
Process parameters
Position accuracy and UPH are established with the target probe, substrate and fixture.
Quality control
Measurement method, repeatability and acceptance limits are verified with real samples.
Delivery scope
Fixture, algorithm, takt and post-check combination are defined in project documents and verified through FAT/SAT.
Share the card, interfaces and target
Send the sample, installed equipment, current issue and target takt. We will acknowledge receipt within one business day.