
二手设备列表
Surplus Equipments List
- 晶圆制造前段设备
Front End Equipments - 集成电路测试设备
Automatic IC Test Equipments (ATE) - 其它
Others

ASML PAS5500/700D
光刻机
Lithography Machine
Wafer Size: 200mm
Resolution: 250nm
Light Source: KrF 248nm
NA: 0.68
Overlay: 35nm

ASML Twinscan AT850
光刻机
Lithography Machine
Wafer Size: 300mm
Resolution: 90nm
Light Source: KrF 248nm
NA: 0.68
Overlay: 12nm

ASML XT1460K
DUV光刻机
Lithography Machine
Wafer Size: 300mm
Resolution: 65nm
Light Source: ArF 193nm
NA: 0.93
Overlay: 5nm

ASML XT1700Fi
DUV光刻机
Lithography Machine
Wafer Size: 300mm
Resolution: 45nm
Light Source: ArFi 193nm
NA: 1.2
Overlay: 5nm

ASML NXT1950i
DUV光刻机
Lithography Machine
Wafer Size: 300mm
Resolution: 38nm
Light Source: ArFi 193nm
NA: 1.35
Overlay: 2.5nm

ASML NXT1960i
DUV光刻机
Lithography Machine
Wafer Size: 300mm
Resolution: 38nm
Light Source: ArFi 193nm
NA: 1.35
Overlay: 2.5nm

ASML NXT1970i
DUV光刻机
Lithography Machine
Wafer Size: 300mm
Resolution: 38nm
Light Source: ArFi 193nm
NA: 1.35
Overlay: 2.5nm

ASML NXT1980i
DUV光刻机
Lithography Machine
Wafer Size: 300mm
Resolution: 38nm
Light Source: ArFi 193nm
NA: 1.35
Overlay: 2.5nm

ASML NXT2050i
DUV光刻机
Lithography Machine
Wafer Size: 300mm
Resolution: 38nm
Light Source: ArFi 193nm
NA: 1.35
Overlay: 2.5nm
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